我国是一个煤炭生产大国，煤炭储量居世界第三。然而，在煤炭开采过程中，矿难事故频繁发生，其中瓦斯灾难事故是危害最大、死亡比例最高的重大事故之一。矿井瓦斯的监测与治理一直是煤炭行业安全管理工作的重中之重。鉴于目前矿井普遍使用的催化燃烧式瓦斯检测存在零漂及稳定性欠佳等缺点，本文提出利用压电谐振原理设计制作甲烷传感器敏感探头，以吸附材料作为甲烷气体的载体，利用压电振子谐振频率对自身重量的敏感性尝试设计制作传感器敏感探头，围绕该敏感探头相关的吸附材料、谐振体设计、性能分析等方面做了系统研究，完成了吸附材料的制备与表征、振动体的有限元分析及设计制作、敏感探头的加工组装及其性能分析等工作。 作为同活性炭和沸石相对比的吸附材料, 分别以硝酸锌、氯化锌和硫酸锌为原料，采用低温水热法制备出了三种以锌离子为金属骨架结构的配合物。对上述配合物进行了XRD、红外光谱、差热-热重及扫描电镜测试分析。XRD分析结果表明，制备的三种金属骨架配合物晶体为单一的纯相，不含其他杂质，结合红外测试结果推测结构为Zn(NH3)2BDC。差热-热重分析表明，三种配合物可以在温度低于200℃使用，骨架结构不坍塌。通过SEM观测发现，以硝酸锌制备的金属配合物结晶效果最好，为针状晶粒，适用于作甲烷气体的载体；以氯化锌、硫酸锌制备的金属配合物结晶为颗粒状； 以PZT8压电陶瓷作为激振材料，磷青铜为振动本体材料，利用有限元方法进行了模态分析，在分析结果的基础上筛选无模态混叠的模型进行三种气敏探头设计并进行加工、组装与测试。实际阻抗谱测试结果表明，有限元分析结果很好地指导了振动体的设计，其分析结果可信； 分别以活性炭、5A型沸石分子筛、MOF金属有机骨架配合3种不同的谐振体，构成9种传感器敏感探头；利用TH2818型自动元件分析仪、搭建阻抗频率特性测试平台，在甲烷浓度为0%-7.6%之间分别对9种传感器敏感探头进行阻抗频谱测试。通过对不同敏感探头在不同甲烷浓度下的阻抗谱谐振峰偏移量（敏感探头输入-输出曲线）、灵敏度与线性度的对比分析，表明以5A型沸石分子筛为吸附材料与3#谐振头搭配得到的探头对甲烷浓度有较好的灵敏度和线性，可作为甲烷传感器敏感探头。

China is a power country of coal production and consumption. Coal mine production safety issue is very conspicuous, frequent mining accidents, of which gas is an outstanding issue in coal mining. In view of some drawbacks of catalytic combustion type fuel gas, which is widely used, the new methane sensor sensitive probe based on the piezoelectric resonance principle were proposed, used in mine, The probe is consisted of sorbents as a carrier of methane gas, resonator as main body of the probe and piezoelectric ceramic working as provider of exciting power. Researches relating to the sensitive probe on sorbents, the resonator designing and performance analysis has been done. The preparation and characterization of sorbents, the finite element analysis of vibration and sensitive probe design, processing, assembling and performance analysis of sensitive probe were completed. As parallel adsorption materials compared with activated carbon and zeolite, three kinds of complexes with zinc ion as metal framework were prepared by low temperature hydrothermal method using zinc nitrate, zinc chloride and zinc sulfate as raw materials. These complexes were analyzed by XRD, FTIR, TG-DTA and SEM test. The XRD analysis results show that three kinds of complexes crystal with metal framework is pure phase, containing no other impurities. According to the FTIR test, the results suggest that the structure of the complex is Zn(NH3)2BDC. TG-DTA analysis shows that the three kinds of complexes can be used below 200 ℃ and the complex framework can not collapse. By SEM observation, it is found that the crystal of the metal complex prepared by zinc nitrate is acicular crystal grain and is suitable for methane gas carrier. The metal complex crystal prepared by zinc chloride and zinc sulfate is granular. PZT8 piezoelectric ceramic is used as the exciting material, phosphor bronze body material for vibration, modal analysis with finite element method. Based on the analysis result, three kinds gas sensors were designed, processed, combined and tested with screening no-mode model. The actual impedance test results show that, the finite element analysis results are of great help to the design of the vibrating body and the analysis result is reliable. Activated carbon respectively, 5A zeolite molecular sieve, three different resonance body with MOF metal organic frame intercombinated 9 kinds of sensitive probe sensors; Using the impedance frequency characteristic test platform which around TH2818 type automatic element analyzer,, when methane concentration was between 0% and 7.6% respectively, impedance spectrums were tested of nine sensor sensitive probes. Comparing and analyzing those impedance spectrums resonance peak offset (sensitive sensor input - output curve), sensitivity and linearity of different sensitive probes under different methane concentrations suggests that with type 5A zeolite molecular sieve as sorbents matching with 3 # resonance head to be a probe has good sensitivity and linear on the methane concentration which can be used as a sensitive probe methane sensors.