声表面波(Surface Acoustic Wave，简写SAW)在十九世纪八十年代被英国物理学家瑞利发现，随着声表面波技术的发展，在二十世纪八十年代，人们开始利用声表面波器件研制、开发新型传感器，声表面波(SAW)加速度传感器就是近年来许多国家重点研究的一种高性能、低成本的声表面波传感器。作为一种灵敏度极高的惯性传感器，深入研究SAW加速度传感器的传感机理及其检测技术，不仅具有理论意义，而且具有工程实用价值。 本文分析了现有悬臂梁式SAW加速度传感器存在的一些问题，研究了针对它们的实际解决方案和工程设计原则。本论文在悬臂梁式SAW加速度传感器研究方面取得的具体成果有： 1. 完成悬臂梁式SAW加速度传感器的系统设计，提高了SAW加速度传感器的敏感性、准确性及其工作性能。 2. 对SAW加速度传感器差动方案进行了改进，不仅进一步抑制了温度干扰因素对加速度传感器的影响，而且降低了其加工制作的难度。 3. 研究了阶跃加速度惯性力激励下，悬臂梁式SAW加速度传感器差频输出的动态响应特征，改变了目前SAW加速度传感器理论研究中缺乏动荷载激励研究的现状，丰富了悬臂梁式SAW加速度传感器的研究理论。 4. 用SAW滤波器为SAW加速度传感器增添了加速度方向判断功能，使SAW加速度传感器可以通过电容器静电力保护悬臂梁和实时调整量程。 5. 设计了双栅MOSFET混频电路，使用Pspice对其进行了仿真研究，仿真的结果和理论符合的很好，并在仿真分析的基础上提出滤波和测频方案。

Surface Acoustic Wave was discovered in 1880s by the British physicist Rayleigh. Along with SAW technology developing people began to utilize SAW (Surface Acoustic Wave) device to develop and research new sensor in 1980s. SAW accelerometer is a kind of high performance, low-cost SAW sensor researched by many countries in recent years. As a kind of high sensitive inertial sensor, SAW accelerometer is worth being studied. It is significative not only in theory but also in engineering. The disadvantage on SAW accelerometer with cantilever beam is analyzed and some engineer improvement plans are discussed. The achievements on the SAW accelerometer are showed below in detail: 1. A new system design about SAW accelerometer with cantilever beam is fulfilled. It not only heightens the SAW accelerometer sensitivity and veracity, but also improves its performance. 2. As the differential scheme of SAW accelerometer is improved, the temperature disturbance to SAW accelerometer is controlled. Another advantage of the new machinery of the SAW accelerometer with cantilever beam is to reduce the technological requirement of SAWR. 3. The dynamics response characteristic of the SAW accelerometer differential frequency output is discussed in the step function acceleration impulse. The work changes the situation on the lack of theoretical research in the SAW accelerometer dynamics characteristic research, and enriches the theory of SAW accelerometer with cantilever beam. 4. The function on judging the direction of acceleration is added to traditional SAW accelerometer by the band characteristic of surface acoustic wave filter (SAWF). Furthermore the new SAW accelerometer system gets the ability to adjust measurement range and sensitivity in time with measuring acceleration, as result of utilizing the electronic force and the acceleration direction judgment SAWF in the parallel-plate capacitor. 5. The paper designs the double-grid MOSFET mixer circuit. It carries on the simulation analysis to it with Pspice and the simulated results are accord with the theories perfectly. The filter and the frequency are proposed the measurement plan on the foundation of simulation analysis.