声表面波(Surface Acoustic Wave，简写SAW)是在十九世纪八十年代被英国物理学家瑞利发现的。随着声表面波技术的发展，在二十世纪八十年代，人们开始利用声表面波器件研制、开发新型传感器。声表面波(SAW)加速度计就是近年来许多国家重点研究的一种高性能、低成本的传感器。作为一种灵敏度极高的惯性传感器，深入研究SAW加速度计的传感机理及其检测技术，不仅具有理论意义，而且具有工程实用价值。 目前提高SAW加速度计精度的主要难题是对其温度误差进行温度补偿。尽管现在已有一些补偿措施，但其效果并不理想。本文分析了环境温度对现有悬臂梁式SAW加速度计的影响；研究了悬臂梁式SAW加速度计的硬件补偿方案及其存在的问题；提出和研究了用人工神经网络对其进行温度补偿的软件补偿技术。 本论文在悬臂梁式SAW加速度计研究方面所做的主要工作取得的成果有： 1.分析了悬臂梁式SAW加速度计信号的静态和动态响应。研究了环境温度对悬臂梁式SAW加速度计工作性能和测量准确度的影响。 2.对SAW加速度计的温度误差进行了硬件补偿设计，通过对SAW加速度计的结构优化设计抑制了温度干扰因素对加速度计的影响。 3.研究了抑制SAW加速度计的温度误差的软件补偿方法，利用神经网络实现了对悬臂梁式SAW加速度计的建模和温度补偿。改变了目前SAW加速度计理论研究中仅使用硬件进行温度补偿的现状，发展了悬臂梁式SAW加速度计温度误差的补偿理论。 4.使用MATLAB仿真软件对软补偿方法进行了分析，得出了利用人工神经网络能够较好地提高SAW加速度计测量精度的结论。

Surface Acoustic Wave was discovered by the British physicist Rayleigh in 1880s. Along with SAW technology developmoment people began to utilize SAW (Surface Acoustic Wave) device to develop and research new sensor in 1980s. SAW accelerometer which is researched by many countries in recent years is a kind of high performance, low-cost sensor. As a kind of high sensitive inertial sensor, SAW accelerometer is worth being studied. It is significative not only in theory but also in engineering. Nowadays the main difficult problem of improving the SAW accelerometer precision is carrying on the temperature compensation to its temperature error. Although at present we have some compensation measures, their effect are not good. This article has analyzed the influences of ambient temperature on the existing bracket beam plate SAW accelerometer; the text has studied hardware compensation plan of the bracket beam plate SAW accelerometer and the exist questions. The text proposed the temperature compensation with the artificial neural networks to it the software compensation technology. The text carries on to the SAW accelerometer has moved the vertical analysis. 1.The article has analyzed the dynamic and static response of the bracket beam plate SAW accelerometer signal.The text has studied the influences of ambient temperature on operating performance and the survey accuracy of the bracket beam plate SAW accelerometer. 2. The text design the hardware compensation to the SAW accelerometer's temperature error, I suppressed the influnence caused by temperature disturbance factor with the SAW accelerometer's structure optimization design. 3. The text studied suppressed the SAW accelerometer's temperature error's software compensating process, and has realized SAW accelerometer's modeling and the temperature compensation with the neural network. It changed the present situation that SAW accelerometer fundamental research only use the hardware to carry on the temperature compensation, and has developed the bracket beam plate SAW accelerometer temperature error's compensatory theory. 4. Analysis the software compensation with MATLAB simulation software , I came to the conclustion of SAW accelerometer measuring accuracy was increased by artificial neural networks.