超精密油石用于加工高精密仪器和设备等，可高效率的获得表面精度较高、近似镜面状态的产品。β-SiC作为陶瓷磨具材料，与相同粒度的其他磨料相比，加工效率高，更适用于轴承沟道的超精加工。由于国际上技术保密的原因，为满足我国相关领域日益扩大的应用需求，研发具有自主知识产权的核心产品已迫在眉睫。本文主要从磨具组成三要素着手，分别探讨了陶瓷结合剂、磨具配方及工艺的改变等因素对β-SiC超精密油石性能的影响。通过XRD、SEM、万能试验机及洛氏硬度计等测试仪器，对β-SiC超精密油石的显微结构、抗弯强度及洛氏硬度等进行测试分析；利用阿基米德排水法测量油石试样的气孔率和密度。 通过正交试验，研究了陶瓷结合剂的配方及工艺各参数对超精密油石气孔率、强度的影响规律，其中硼玻璃对超精密油石性能影响最大，烧结温度的影响最小，获得的最佳方案为：硼玻璃9wt%，刚玉1.5g，钾长石18g，烧结温度810℃。硼玻璃含量增加，超精密油石气孔率降低，密度增加，抗弯强度、硬度均先增加而后减小。硼玻璃最佳添加量为9wt%，β-SiC超精密油石试样的气孔率为51.0%，密度为1.25g∙cm-3，抗弯强度为21.7MPa，洛氏硬度为41.2HRB。 通过改变磨粒粒度、造孔剂含量、成型压力以及保压时间可得：磨粒粒度变粗，油石试样气孔率下降，抗弯强度提高，选用w7磨粒粒度使轴承内圈的表面光洁度可达到▽11以上。造孔剂含量增加，超精密油石气孔率增加，密度降低，抗弯强度、洛氏硬度均降低，添加4wt%造孔剂，磨具气孔率、强度和超精加工效果均比较理想。成型压力增加，抗弯强度先增加后减小，洛氏硬度逐渐增加，最终确定成型压力为20KN。保压时间最终确定为60s。 经过浸渍处理后的超精密油石，其抗弯强度从原来的22.1MPa增加到28.1MPa，提高了27.3%，洛氏硬度从原来的37.5HRB增加到57.9HRB，提高了54.4%。

The superfinishing stone is mainly used in the producing process of highly-delicate apparatus and devices etc., so that the mirror-like surface of these products can be obtained in a highly efficient way.β-SiC as ceramic abrasive materials, compared with the same size of other abrasive, has high machining efficiency, and it is mainly used for bearing the channel superfinishing.Due to the technical security between countries, in order to meet the ever increasing practical demand in relative areas, it is urgent to research and develop our own products with our own intellectual property.This article mainly from the three elements of abrasive tools, the influence of the change of the composition of vitrified bond, abrasive formula and technics on the properties of the β-SiC superfinishing stone had been discussed, respectively.The phase composition, microstructure, flexural strength, and rockwell hardness etc.of the β-SiC superfinishing stone were studied by XRD, SEM, universal testing machine, and rockwell hardness tester etc. instruments. Archimedes drainage method is used to measure superfinishing stone sample porosity and density. The influence law of formulation and process of ceramic bond parameters vs the porosity and strength of superfinishing stone was studied through the orthogonal experiment.Borosilicate glass had the greatest influence on the superfinishing stone performance, and the influence of sintering temperature is minimal.Finally get the best solution is that borosilicate glass was 9wt%, corundum was 1.5 g, potassium feldspar was 18 g, the sintering temperature of 810 ℃.With the increase of the content of the borosilicate glass, the superfinishing stone porosity reduced, density increased, flexural strength and rockwell hardness first increased and then decreased. Optimum adding amount of the borosilicate glass as 9wt %, the porosity, density, flexural strength and rockwell hardness of β-SiC superfinishing stone was 51.0%, 1.25g∙cm-3, 21.7MPa and 41.2HRB, respectively. In this work, size of grains, the molding pressure, the content of pore-forming agent and the holding time were also investigated, the results were as follows.The coarser the abrasive stone grains，the lower porosity and the higher flexural strength of the superfinishing stone. Choose w7 grinding abrasive can make the surface roughness of bearing inner ring achieved ▽11 or more.The content of Pore-forming agent increased, the superfinishing stone porosity increased, the density reduced, the flexural strength and hardness decrease. When adding amount of 4 wt % pore-forming agent, it not only balanced the superfinishing stone porosity and flexural strength, but also obtained better effect of superfinishing.With the molding pressure increased, the flexural strength first increased and then decreased, and hardness increased. Comprehensive consideration, the molding pressure ultimately was 20 KN.The holding time finally was 60 s. After dealing with the impregnation of superfinishing stone, the flexural strength increased from the original 22.1 to 28.1 MPa, increased by 27.3%, and the rockwell hardness increased from the original 37.5 to 57.9 HRB, increased by 54.4%.