传感器技术作为现代科学技术及各项领域的重要技术基础，是当今世界上令人瞩目、迅猛发展的一种高新技术，是一个国家科学技术发展和综合实力的重要标志之一。作为传感器的一个重要分支，加速度传感器受到了越来越多的关注。 电容式加速度传感器因其灵敏度高、功耗低、温漂小、结构简单可靠、非侵入式安装等特点，一直是加速度传感器敏感结构的设计重点。论文在分析变间隙差动电容式加速度传感器原理及传感器输出信号特点的基础上，针对微小电容变化量的测量，设计并制作了改进型张弛振荡测量电路；并对电路进行了性能测试，测试结果表明该电路在灵敏度、分辨率、非线性度、零漂等方面均具有良好性能。针对测量电路的输出信号，设计了以DSP为核心的数据采集与处理系统，实现测量数据的处理及上传功能。上位机基于LabVIEW虚拟仪器软件设计，实现串口数据的读取、文本与曲线结合的显示以及测量数据完整存储等功能。最后，对整个测量系统进行标定和应用实验验证，结果表明，所设计的差动电容式加速度传感器测量系统运行良好，可以实时准确的显示被测物体的加速度值。 该测量系统可广泛应用于工业自动化、汽车安全气囊、医疗设备等领域，具有良好的推广应用价值。

As an important technical foundation of modern science and technology, sensor technology is a high-tech with remarkable and rapid development in today's world, and it is one of the most important symbol of the science and technology development and the overall strength of a national. As an important branch of the sensor, acceleration sensor receives more and more attention. The sensitive structure of capacitive accelerometer has been the key design of accelerometer because of its high sensitivity, low power consumption, small temperature drift, simple structure, non-intrusive installation, etc. Based on the principle of variable clearance differential capacitive acceleration sensor and the sensor output signal characteristics, this paper designed and produced a modified relaxation oscillation measurement circuit, for the measurement of small capacitance change. The test result of this circuit shown it has good performance in sensitivity, resolution, non-linearity, zero drift,etc. For the output signal of the measuring circuit, then designed data acquisition and processing system which used DSP as its core, for achieving the function about processing measurement data and uploading data to PC.By designing of LabVIEW virtual instrument software, it realized the serial data reading, the combination display of the text and curve, the storage of measurement data, etc. Finally, the result of calibration and actual experiments for the entire measurement system shown that the designed capacitive accelerometer measurement system was running well, acceleration of the measured object can be displayed real-time and accurately. This measuring system can be widely used in industrial automation, automotive airbags, medical equipment, and other fields, so it has high application value.