随着MEMS的发展，微型泵市场需求量和品种越来越多，其结构也日趋复杂，传统的经验设计方法已难以满足高效率、高质量微型泵设计的要求，利用CAD\CAE技术进行微型泵设计和分析已成为一种必然趋势。然而，当前MEMS CAD设计的系统理论知识还未形成，相应的工具发展水平远远滞后于产品开发的步伐。为此，本文主要对微型泵优化设计的系统理论方法进行综合分析和研究，并对相应的原型系统软件进行开发研究和应用示范验证。 本文的研究内容和成果主要有： （1）在现有MEMS正反向设计方法的基础上，提出了一种结合有限元数值模拟分析和非线性回归分析的微型泵综合优化设计方法。 （2）根据提出的微型泵综合优化设计方法，以热驱动微型泵为实例，进行了综合优化设计应用示范研究和验证，主要包括：1) 热驱动微型泵有限元模型建立、求解、结果分析验证，并将已验证的模拟分析过程开发成参数化程序（MAPDL），用于重复模拟分析使用；2) 设计大量不同参数的热驱动微型泵实例，并利用所开发的MAPDL程序，对不同参数的实例进行模拟分析，获取优化设计所需的大量数据；3) 采用非线性逐步回归分析方法对热驱动微型泵综合优化模型建立过程进行分析，并采用SAS软件实现了最优回归模型的建立；4) 利用已开发的遗传算法优化设计求解程序对最优回归模型进行求解，得到最优设计参数，并验证了结果的正确性和方法的可行性。 （3）对微型泵综合优化设计过程进行了原型系统开发研究，建立了原型系统构成框架；并采用面向对象技术及UML建模语言对系统开发进行了分析和建模；采用JAVA语言及JBuilder集成工具开发了原型系统软件；最后以热驱动微型泵为实例，从原型验证的层面上对系统平台进行了应用示范研究。 本文的研究成果将为设计高效率、高质量的微型泵提供一种新的方法和思路以及原型软件，为微型泵优化设计软件工具的进一步开发奠定了基础。

With the development of micro electric mechanical system (MEMS), the configuration of micro-pump is becoming more complex and the markets demand and the variety of micro-pump is constantly increasing. Therefore, the traditional design method depended on experience cannot satisfy the requirements of high efficiency and high quality for micro-pump design, and it has become an inevitable trend that using new design and analysis method based on Computer Aided Design and Computer Aided Engineering(CAD/CAE)technique in micro-pump design. Nevertheless, the current systematic theories for MEMS design still not are perfectly established, and the correspondent design tools lag far behind the product development. To deal with the above-mentioned problems, the theories and approaches of the synthesis optimization system for micro-pump is studied and a prototype system is developed and demonstrated in this dissertation. The main research contents and achievements in this dissertation are as follows: （1）Based on the “tradition” and “object” MEMS design method, a new method of micro-pump synthesis optimization design is proposed by cooperating the finite element numerical simulation method with nonlinear regression method. （2）Based on the proposed micro-pump synthesis optimization method, and taking the thermal actuated micro-pump as an instance, the synthesis optimization design application is studied and certificated, which is as follows: 1) The finite element model of thermal actuated micro-pump is established, resolved and verified, and a MAPDL program is developed based on the process, which is used for further verifying analysis. 2) Many thermal actuated micro-pump instances with different parameter are designed and analyzed by Micro-pump ANSYS Parametric Design Language (MAPDL), and abundant data are obtained for optimal model establishment. 3) The established process of the micro-pump synthesis optimization model is analyzed by nonlinear multi-variable regression analysis method, and the micro-pump synthesis optimization model is finally established by SAS tool. 4) The genetic algorithm program is used to resolve the synthesis optimization model, and the optimized design parameters are obtained and verified, and the final results show the feasibility of the presented method. （3）The prototype system of micro-pump synthesis optimization design process is studied and developed, and the prototype system framework is established. Synchronously, analyzing and modeling are performed by the object-oriented technology (OOT) and UML, and the prototype system software are developed by the JAVA language and JBuilder tool. Finally, taking a thermal actuated micro-pump as an instance, the developed systematical platform is verified and demonstrated on the prototype verification aspect. The achievements obtained in this research provide a new method and idea and a prototype system software for designing high efficiency and high quality micro-pump, and which also is a basic for further developing micro-pump optimization design software tools.