超精密研磨向着提高加工效率、加工精度和降低加工成本方向发展，亟待解决磨料价格贵、研磨液悬浮性差等问题。本文采用高品质新型β-SiC微粉制备高悬浮性水基研磨液，以改善研磨液的加工效果并降低成本。 利用正交试验对影响研磨浆料悬浮性的添加剂进行了系统的研究，得到了最优配方，并首次提出用复配增稠剂的方法来提高研磨液的悬浮性。在钠膨润土和羧甲基纤维素钠（CMC）的含量分别为3wt%和0.3wt%时，溶液的悬浮性达到100%，并且静置15天悬浮浆料上下颗粒分散均匀，无颗粒沉降。 采用沉降法、显微观察和粘度检测，研究了pH值、分散剂和表面活性剂对已得到的悬浮体系悬浮分散性的影响。体系pH值在8～10之间颗粒分散均匀、悬浮性好；分散剂和表面活性剂的加入会降低悬浮体系的悬浮性。并由此得出复配增稠剂的胶凝结构受溶液中电解质的影响。 为检测研磨液的使用性能，对W14、W10、W5、W1的β-SiC磨粒和人造金刚石进行了研磨对比。结果表明，β-SiC研磨硅和不锈钢的效率优于金刚石，去除率分别约是金刚石的1.2～1.9倍和1.3～3.4倍，但表面划痕比金刚石的明显；金刚石研磨玻璃的效率优于β-SiC，约是β-SiC的1.1～5.5倍。通过与商用研磨液对玻璃、硅和不锈钢的研磨对比发现，本实验制得的研磨液研磨效率高，但表面质量没有商用研磨液的好。 针对不锈钢的研磨效果，对研磨液润滑性、研磨效率和表面质量进行了优化。实验结果表明，研磨效率和表面质量是一对矛盾体，研磨效率高，表面粗糙度就差。综合考虑不锈钢的研磨效率和表面质量，选取研磨参数如下：润滑剂量为5wt%，β-SiC浓度为6CT/100ml，研磨时间为10min，研磨压力和研磨盘转速分别为115N、25HZ。测得W10的β-SiC研磨不锈钢的去除率r=7.53μm/min，表面粗糙度Ra=0.06μm、Rq=0.63μm、Rz=0.08μm。

Ultra-precision grinding has been developing toward improving material removal rate and grinding quality, and reducing processing costs, so it’s urgent to solve the problems of expensive abrasive and poor slurry suspension. In this paper, high-quality β-SiC powder is used to prepare high suspended aqueous slurry for the purpose of improving the grinding performance and reducing costs. First, orthogonal experiment is exploited to systematically study the additives which impact the slurry suspension. As a result, the optimal formula is obtained and the complex thickener is raised for the first time to improve the slurry suspension. The suspension rate can reach up to 100% when pH=8 and the content of sodium bentonite and sodium carboxymethyl cellulose are 3wt% and 0.3wt%, which the slurry can sustain for more than15 days and there is no particle sedimentation. Then, sedimentation method, microscopic observation and viscosity detection are used to study the influence of pH, dispersant and surfactant on the obtained suspension system. The results show that slurry suspension is more well when PH value is between 8 to 10 and adding dispersants and surfactants will reduce the suspension, and a conclusion can be got that the gel structure of complex thickener is destroyed by the electrolyte solution. To detect the slurry performance, grinding contrast between different particle sizes (W14, W10, W5, W1) of β-SiC and synthetic diamond is carried out. The results show that the material removal rate of β-SiC is larger than diamond when grinding silicon and stainless steel, the removal rates are about 1.2 to 1.9 times and 1.3 to 3.4 times of diamond, but the surface scratches is more obvious than diamond; However the glass material removal rate is larger by diamond, it’s about 1.1 to 5.5 times than β-SiC. Meanwhile, the slurry obtained in this experiment is compared with the commercial slurry. The results show that material removal rate of the former is more rapidly, but the surface quality is worse. In view of stainless steel grinding result, the slurry lubricant and material removal rate and surface quality are optimized. The experimental results show that the material removal rate and surface quality is a contradiction, the higher the material removal rate, the worse the surface roughness and the optical brightness. Considering the material removal rate and surface quality synthetically, the grinding parameters are as follows: lubricant is 5%, β-SiC concentration is 6CT/100ml, grinding time is 10min, the polishing pressure and plate speed are 115N, 25HZ .In this condition, grinding stainless steel with W10 β-SiC, the removal rate is 7.53μm/min, surface roughness Ra = 0.06μm, Rq = 0.63μm, Rz = 0.08μm.